JPH0444980Y2 - - Google Patents

Info

Publication number
JPH0444980Y2
JPH0444980Y2 JP13331688U JP13331688U JPH0444980Y2 JP H0444980 Y2 JPH0444980 Y2 JP H0444980Y2 JP 13331688 U JP13331688 U JP 13331688U JP 13331688 U JP13331688 U JP 13331688U JP H0444980 Y2 JPH0444980 Y2 JP H0444980Y2
Authority
JP
Japan
Prior art keywords
air
clean room
chamber
supply port
air supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13331688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255036U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13331688U priority Critical patent/JPH0444980Y2/ja
Publication of JPH0255036U publication Critical patent/JPH0255036U/ja
Application granted granted Critical
Publication of JPH0444980Y2 publication Critical patent/JPH0444980Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP13331688U 1988-10-12 1988-10-12 Expired JPH0444980Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13331688U JPH0444980Y2 (en]) 1988-10-12 1988-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13331688U JPH0444980Y2 (en]) 1988-10-12 1988-10-12

Publications (2)

Publication Number Publication Date
JPH0255036U JPH0255036U (en]) 1990-04-20
JPH0444980Y2 true JPH0444980Y2 (en]) 1992-10-22

Family

ID=31391066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13331688U Expired JPH0444980Y2 (en]) 1988-10-12 1988-10-12

Country Status (1)

Country Link
JP (1) JPH0444980Y2 (en])

Also Published As

Publication number Publication date
JPH0255036U (en]) 1990-04-20

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